The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Oct. 18, 2004
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
John S. Taylor, San Jose, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Paul T. Russell, Scotts Valley, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Richard M. Wallingford, San Jose, CA (US);
Kishore Bubna, Fremont, CA (US);
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
John S. Taylor, San Jose, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Paul T. Russell, Scotts Valley, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Richard M. Wallingford, San Jose, CA (US);
Kishore Bubna, Fremont, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates image data. Process nodes are coupled to the first network, and processes the data to produce reports. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the anomaly report. A second network receives the anomaly reports from the process nodes. A job manager is coupled to the second network, and receives the anomaly reports from the process nodes and sends information to the process nodes to coordinate the processing of the data in the process nodes.