The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Oct. 19, 2004
Applicants:
Jonathan P. Pelz, Columbus, OH (US);
David T. Lee, Dublin, OH (US);
Bharat Bhushan, Powell, OH (US);
Inventors:
Jonathan P. Pelz, Columbus, OH (US);
David T. Lee, Dublin, OH (US);
Bharat Bhushan, Powell, OH (US);
Assignee:
The Ohio State University, Columbus, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for measuring nm-scale tip-sample capacitance including (a) measuring a cantilever deflection and a change in probe-sample capacitance relative to a reference level as a function of a probe assembly height; (b) fitting out-of-contact data to a function; (c) subtracting the function from capacitance data to get a residual capacitance as a function of the probe assembly height; and (d) determining the residual capacitance at a z-position where the cantilever deflection is zero.