The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Dec. 03, 2003
Christophe Maleville, La Terasse, FR;
Fabrice Letertre, Grenoble, FR;
Thibaut Maurice, Grenoble, FR;
Carlos Mazure, St. Nazire les Eymes, FR;
Fredéric Metral, St. Quantin sur Isère, FR;
Christophe Maleville, La Terasse, FR;
Fabrice Letertre, Grenoble, FR;
Thibaut Maurice, Grenoble, FR;
Carlos Mazure, St. Nazire les Eymes, FR;
Fredéric Metral, St. Quantin sur Isère, FR;
S.O.I.Tec Silicon on Insulator Technologies S.A., Bernin, FR;
Abstract
The present invention relates to a method for recycling a substrate that has a residue on its surface and a detachment profile resulting from an implantation process. The method includes removing the residue from the substrate to a level substantially equivalent to that of the detachment profile, thus obtaining a substantially uniform planar surface on the substrate, and then polishing the entire surface of the substrate to eliminate defects.