The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Dec. 19, 2002
Boguslaw F. Gajdeczko, Princeton, NJ (US);
Kenneth M. Bogursky, Oxford, CT (US);
Daniel N. Galburt, Wilton, CT (US);
Willy M. Sander, Stamford, CT (US);
Kevin J. Violette, Woodbury, CT (US);
Boguslaw F. Gajdeczko, Princeton, NJ (US);
Kenneth M. Bogursky, Oxford, CT (US);
Daniel N. Galburt, Wilton, CT (US);
Willy M. Sander, Stamford, CT (US);
Kevin J. Violette, Woodbury, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor, and/or snubber made of porous material, and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.