The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2006
Filed:
Jun. 26, 2003
Robert L. Gerlach, Portland, OR (US);
Mark W. Utlaut, Scappoose, OR (US);
Trevor Dingle, Bluntisham, GB;
Marek Uncovsky, Brno, CZ;
Robert L. Gerlach, Portland, OR (US);
Mark W. Utlaut, Scappoose, OR (US);
Trevor Dingle, Bluntisham, GB;
Marek Uncovsky, Brno, CZ;
FEI Company, Hillsboro, OR (US);
Abstract
A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates