The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2006
Filed:
Sep. 29, 2004
Applicants:
Toshihiro Hayami, Nirasaki, JP;
Naoyuki Umehara, Nirasaki, JP;
Tsuyoshi Hasegawa, Suita, JP;
Inventors:
Assignees:
Tokyo Electron Limited, Tokyo-To, JP;
Neomax Materials Co., Ltd., Osaka-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01R 13/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrical joint forming member is held between adjacent conductive members included in a semiconductor device fabricating apparatus to reduce electrical resistance between those conductive members. The electrical joint forming member includes an elastic member made of a titanium sheet (75 μm thick, 2 mm wide) and having a surface covered with an aluminum layer (7 μm thick), the aluminum layer being formed by joining an aluminum sheet to the surface of the titanium sheet by cold-roll bonding.