The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Feb. 06, 2004
Alexander Epple, Aalen, DE;
Helmut Beierl, Heidenheim, DE;
Alexander Epple, Aalen, DE;
Helmut Beierl, Heidenheim, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A catadioptric projection lens configured for imaging a pattern arranged in an object plane () onto an image plane () while creating a single, real, intermediate image () has a catadioptric imaging group () having a concave mirror () and a beam-deflector (), and a dioptric imaging lens group () that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens () of a dioptric section () and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses () of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.