The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Mar. 05, 2004
Kenneth a Costello, Alameda County, CA (US);
Kevin P. Fairbairn, Santa Clara County, CA (US);
David W. Brown, Alameda County, CA (US);
Yun Chung, Santa Clara County, CA (US);
Patricia Gober, Santa Clara County, CA (US);
Edward Yin, Santa Clara County, CA (US);
Kenneth A Costello, Alameda County, CA (US);
Kevin P. Fairbairn, Santa Clara County, CA (US);
David W. Brown, Alameda County, CA (US);
Yun Chung, Santa Clara County, CA (US);
Patricia Gober, Santa Clara County, CA (US);
Edward Yin, Santa Clara County, CA (US);
Intevac, Inc., Santa Clara, CA (US);
Abstract
Backthinning in an area selective manner is applied to imaging sensorsfor use in electron bombarded devices. A further arrangement results in an array of collimatorsaligned with pixelsor groups of pixels providing improved image contrast of such image sensor. Provision of a thin P-doped layeron the illuminated rear surface provides both a diffusion barrier resulting in improved resolution and a functional shield for reference pixels. A gradient in concentration of P-doped layeroptimizes electron collection at the pixel array.