The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Dec. 24, 2003
Stefan Schulte, Aalen, DE;
Bernd Dörband, Aalen, DE;
Henriette Müller, Aalen, DE;
Wolfgang Kähler, Aalen, DE;
Stefan Schulte, Aalen, DE;
Bernd Dörband, Aalen, DE;
Henriette Müller, Aalen, DE;
Wolfgang Kähler, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An interferometer system comprises a reference surface, a support for an object providing an object surface, a radiation source for emitting radiation of an adjustable frequency onto the reference surface and the object surface, a position-sensitive radiation detector, a controller for adjusting a plurality of different frequencies of the radiation emitted by the radiation source, and an integrator for averaging the interference patterns superposed on the radiation detector at different frequencies. Moreover, there is provided a method for recording an interferogram, a method for providing an object with a target surface as well as a method for manufacturing an object with a target surface.