The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Sep. 23, 2002
Applicants:
Valery M. Dubin, Portland, OR (US);
Christopher D. Thomas, Aloha, OR (US);
Vinay B. Chikarmane, Portland, OR (US);
Inventors:
Valery M. Dubin, Portland, OR (US);
Christopher D. Thomas, Aloha, OR (US);
Vinay B. Chikarmane, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/04 (2006.01); B05D 3/10 (2006.01); C25D 5/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
Seed layer treatment to remove impurities in the seed layer that might lead to the formation of voids in interconnect circuit features. In one embodiment, the seed layer is heated in a reducing environment. In another embodiment, the seed layer is washed with a surfactant that is compatible with a surfactant used when forming the remainder of the circuit feature on the seed layer. Yet another embodiment combines both techniques.