The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Mar. 11, 2004
Hung-en Tai, Taipei Hsien, TW;
Chien-chung Chen, Hsin-Chu, TW;
Haw-jyue Luo, Hsin-Chu, TW;
Sheng-jen Wang, Hsin-Chu, TW;
Hung-En Tai, Taipei Hsien, TW;
Chien-Chung Chen, Hsin-Chu, TW;
Haw-Jyue Luo, Hsin-Chu, TW;
Sheng-Jen Wang, Hsin-Chu, TW;
Powerchip Semiconductor Corp., Hsin-Chu, TW;
Abstract
A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.