The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Aug. 25, 2003
Chih-chung Chen, Taipei, TW;
Chengkuo Lee, Taipei, TW;
Yen-jyh Lai, Hsinchu, TW;
Wen-chih Chen, Yilan, TW;
Ming-hung Tsai, Sanchong, TW;
Chih-Chung Chen, Taipei, TW;
Chengkuo Lee, Taipei, TW;
Yen-Jyh Lai, Hsinchu, TW;
Wen-Chih Chen, Yilan, TW;
Ming-Hung Tsai, Sanchong, TW;
Asia Pacific Microsystems, Inc., Hsinchu, TW;
Abstract
Electrostatically operated micro-optical devices and method of manufacturing such devices is disclosed. In a preferred embodiment, the micro-optical devices using electrostatic comb drive actuators having new spring designs to overcome side instability and exhibit enlarged displacement, having new designs of comb finger electrode shapes to generate larger force output, and having new clip type latch mechanism to control the corresponding device at certain states in an analog manner without electrical power consumption. Based on the proposed optical path and device configurations, integration and assembly of a plurality of reflective micro-mirrors in conjunction with proposed new comb drive actuators is very promising way to provide micro-optical devices to get good optical performance and suitable for multi-channel applications. We also disclose several process techniques to manufacture the micro-optical devices with said electrostatic comb drive actuator in a mass production manner with higher yield.