The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Jan. 15, 2003
Method and system for locating chip-level defects through emission imaging of a semiconductor device
Applicants:
Boon Y. Ang, Cupertino, CA (US);
Mehrdad Mahanpour, Union City, CA (US);
Mohammed Massoodi, Los Altos, CA (US);
Inventors:
Boon Y. Ang, Cupertino, CA (US);
Mehrdad Mahanpour, Union City, CA (US);
Mohammed Massoodi, Los Altos, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 31/28 (2006.01); G06K 9/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
Aspects for locating chip-level defects through emission imaging of a semiconductor device are described. The aspects include providing a semiconductor device for inspection within an emission imaging system. Emission detection from a frontside and backside of the semiconductor device substantially simultaneously is then performed in the emission imaging system, wherein the emissions detected indicate potential defects within the semiconductor device.