The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
Sep. 16, 2002
Lizhong Sun, San Jose, CA (US);
Liang-yuh Chen, Foster City, CA (US);
Siew Neo, Santa Clara, CA (US);
Feng Q. Liu, San Jose, CA (US);
Alain Duboust, Sunnyvale, CA (US);
Stan D. Tsai, Fremont, CA (US);
Rashid Mavliev, Campbell, CA (US);
Lizhong Sun, San Jose, CA (US);
Liang-Yuh Chen, Foster City, CA (US);
Siew Neo, Santa Clara, CA (US);
Feng Q. Liu, San Jose, CA (US);
Alain Duboust, Sunnyvale, CA (US);
Stan D. Tsai, Fremont, CA (US);
Rashid Mavliev, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Aspects of the invention generally provide a method and apparatus for polishing a substrate using electrochemical deposition techniques. In one aspect, an apparatus for polishing a substrate comprises a counter-electrode and a pad positioned between a substrate and the counter-electrode and a pad positioned between a substrate and the counter-electrode. A dielectric insert is positioned between the counter-electrode and the substrate. The dielectric insert has a plurality of zones, each zone permitting a separate current density between the counter-electrode and the substrate. In another embodiment, an apparatus for polishing a substrate that include a conductive layer comprises a counter-electrode to the material layer. The counter-electrode comprises a plurality of electrically isolated conductive elements. An electrical connector is separately coupled to each of the conductive elements.