The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Aug. 20, 2003
Chien-huei Chen, San Jose, CA (US);
Vivek Bhagat, Santa Clara, CA (US);
Qiang Song, San Jose, CA (US);
James A. Quigley, Mountain View, CA (US);
Ashok V. Kulkarni, San Jose, CA (US);
Chien-Huei Chen, San Jose, CA (US);
Vivek Bhagat, Santa Clara, CA (US);
Qiang Song, San Jose, CA (US);
James A. Quigley, Mountain View, CA (US);
Ashok V. Kulkarni, San Jose, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A method of tuning an inspection system. An inspection piece is sensed and analyzed to identify anomalies. Level information is analyzed with an initial set of thresholds, and an initial portion of the anomalies are flagging as defects. The inspection system parameters are changed, and the level information is analyzed with a modified set of thresholds. The anomalies are flagged as defects based on the immediately preceding analysis of the level information. The steps of changing the thresholds and reflagging the defects are repeated as desired, and the modified set of thresholds are stored for use in an inspection system recipe.