The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Dec. 06, 2001
Kiyohito Iijima, Nirasaki, JP;
Shigeru Ishizawa, Nirasaki, JP;
Kiyohito Iijima, Nirasaki, JP;
Shigeru Ishizawa, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A semiconductor processing system has processing apparatuses (A,B), waiting ports (A,B,C), a common transfer mechanism (), and a control section (). The control section () performs information processing, using a remaining process time and total transfer time, while a first target object is processed in a first one of the processing apparatuses (A,B). The remaining process time is a time to complete a process on the first target object in the first processing apparatus, and to make the first target object ready for transfer from the first processing apparatus. The total transfer time is a time to take out a target object from a first one of the waiting ports (A,B,C), and to transfer the target object to the waiting position for the first processing apparatus. The control section () starts transferring a new target object from the first waiting port toward the waiting position for the first processing apparatus, based on a result of the information processing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile