The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Mar. 30, 2005
Applicants:
Yunsoo Kim, Daejeon, KR;
Chang Gyoun Kim, Daejeon, KR;
Taek-mo Chung, Daejeon, KR;
Sun Sook Lee, Daejeon, KR;
Ki-seok an, Daejeon, KR;
Taek Seung Yang, Daejeon, KR;
Hong Suk Jang, Daejeon, KR;
Inventors:
Yunsoo Kim, Daejeon, KR;
Chang Gyoun Kim, Daejeon, KR;
Taek-Mo Chung, Daejeon, KR;
Sun Sook Lee, Daejeon, KR;
Ki-Seok An, Daejeon, KR;
Taek Seung Yang, Daejeon, KR;
Hong Suk Jang, Daejeon, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 1/08 (2006.01); C23C 16/18 (2006.01);
U.S. Cl.
CPC ...
Abstract
A volatile copper aminoalkoxide complex of formula (I) can form a copper thin film having an improved quality by metal organic chemical vapor deposition (MOCVD):wherein, R, R, Rand Rare each independently Calkyl optionally carrying one or more fluorine substituents; and m is an integer in the range of 1 to 3.