The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Aug. 14, 2002
Yoichi Uchimaki, Yamaguchi, JP;
Yuko Egawa, Yamaguchi, JP;
Tetsunori Kaji, Yamaguchi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Bays. . . are connected to an inter-bay transfer linevia bay stockers. . . , respectively. The bayis, in this embodiment, composed of a single wafer transfer linehaving a looped planar shape and processing equipmentsarranged side by side along the longitudinal transfer direction of the transfer line (direction crossing the transfer direction of inter-bay transfer line). Processing equipmentsare arranged side by side along one side of the transfer line, and the remaining processing equipmentsare arranged side by side along the other side of the transfer line. The processing equipmentsare equipped with transfer robots, respectively. Moreover, processing equipmentsare each equipped with a chamber (not shown) for processing wafers W one by one (single wafer processing chamber).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile