The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2005
Filed:
Jun. 29, 2001
Franz Cemic, Weilmuenster, DE;
Lambert Danner, Wetzlar-Naunheim, DE;
Gerhard Hoppen, Wetzlar, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
Abstract
An illumination device according to the present invention comprises a light source (), an optical fiber bundle (), a coupling-in optical system () before and a coupling-out optical system () after the fiber bundle (), and an illuminating optical system (). A homogenizing optical system () between the coupling-out optical system () and illuminating optical system () brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system () advantageously comprises a micro-honeycomb condenser () and a lens member () which superimpose the exit opening of the fiber bundle () in an intermediate image plane () to form a homogeneous intermediate image. The coordinate measuring instrument comprises an X-Y measurement stage () for receiving a substrate with a feature () that is to be measured, an illumination system with a light source (), an optical fiber bundle (), a coupling-in optical system (), a coupling-out optical system (), an illuminating optical system () for illuminating an image field on the substrate, and a detector device () for determining the position of the feature. A homogenizing optical system () between the coupling-out optical system () and illuminating optical system () brings about a homogenization of the intensity distribution in the image field.