The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2005
Filed:
Jan. 28, 2003
Applicants:
Wen-kuei Hsieh, Hsinchu, TW;
Chih-mu Huang, Hsinchu, TW;
James Juen Hsu, Hsinchu, TW;
Inventors:
Assignee:
Winbond Electronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/302 ;
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a memory device utilizes multi-etching processes to respectively construct isolation trenches in a memory substrate that has a memory array area and a peripheral circuit region, wherein the depth of the trenches in the peripheral circuit region is deeper into the memory substrate than the depth of the trenches in the memory array area. Therefore, possible current leakage caused from the high operating voltage is effectively mitigated, and the performance of the memory device is increased.