The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Aug. 04, 2004
Qing MA, San Jose, CA (US);
Valluri Rao, Saratoga, CA (US);
John Heck, Mtn View, CA (US);
Li-peng Wang, Santa Clara, CA (US);
Dong Shim, Framingham, MA (US);
Quan Tran, San Jose, CA (US);
Qing Ma, San Jose, CA (US);
Valluri Rao, Saratoga, CA (US);
John Heck, Mtn View, CA (US);
Li-Peng Wang, Santa Clara, CA (US);
Dong Shim, Framingham, MA (US);
Quan Tran, San Jose, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.