The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2005

Filed:

Jul. 09, 2004
Applicants:

Philippe Perdu, Toulouse, FR;

Romain Desplats, Toulouse, FR;

Felix Beaudoin, Toulouse, FR;

Praveen Vedagarbha, Fremont, CA (US);

Martin Leibowitz, Fremont, CA (US);

Kenneth R. Wilsher, Palo Alto, CA (US);

Inventors:

Philippe Perdu, Toulouse, FR;

Romain Desplats, Toulouse, FR;

Felix Beaudoin, Toulouse, FR;

Praveen Vedagarbha, Fremont, CA (US);

Martin Leibowitz, Fremont, CA (US);

Kenneth R. Wilsher, Palo Alto, CA (US);

Assignee:

Credence Systems Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R031/302 ;
U.S. Cl.
CPC ...
Abstract

A method and apparatus for laser-assisted fault mapping which synchronizes the laser control with the tester unit. The inventive method provides for laser-assisted pseudo-static fault mapping to localize defects in a device whose inputs are being stimulated dynamically by a tester. It further provides for laser-assisted dynamic soft error mapping, to localize in terms of location and to correlate with respect to a specific test vector, sensitive areas in a device by utilizing device performance criteria such as pass-fail status outputs. The apparatus includes a fully controllable dynamic laser stimulation apparatus connected to a control unit that provides complete synchronization with a tester unit.


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