The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2005
Filed:
Jan. 05, 2004
Shuichi Takeuchi, Hitachinaka, JP;
Mine Nakagawa, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Kazutaka Nimura, Nagoya, JP;
Shuichi Takeuchi, Hitachinaka, JP;
Mine Nakagawa, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Kazutaka Nimura, Nagoya, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Hitachi Science Systems, Inc., Ibaraki, JP;
Abstract
The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.