The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2005
Filed:
Jan. 27, 2000
Applicants:
Ronald Spangler, Arlington, MA (US);
Emanuele Bianchini, Charlestown, MA (US);
Baruch Pletner, Newton, MA (US);
Betsy Marsh, Brookline, MA (US);
Robert Jacques, Andover, MA (US);
Inventors:
Ronald Spangler, Arlington, MA (US);
Emanuele Bianchini, Charlestown, MA (US);
Baruch Pletner, Newton, MA (US);
Betsy Marsh, Brookline, MA (US);
Robert Jacques, Andover, MA (US);
Assignee:
Cymer, Inc., San Diego, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B23P021/00 ; H01L041/08 ;
U.S. Cl.
CPC ...
Abstract
A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.