The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Nov. 14, 2002
David Bruce Coldren, San Jose, CA (US);
Prashant A. Aji, San Jose, CA (US);
David Winslow Randall, Redwood City, CA (US);
Sharon Marie Mccauley, San Jose, CA (US);
David Bruce Coldren, San Jose, CA (US);
Prashant A. Aji, San Jose, CA (US);
David Winslow Randall, Redwood City, CA (US);
Sharon Marie McCauley, San Jose, CA (US);
KLA-Tencor Technologies, Corporation, Milpitas, CA (US);
Abstract
Techniques for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers are described. Specifically, this involves setting up recipes that allows each system to accurately inspect semiconductor wafers. The invention gathers pertinent information from these tools and presents the information to users in a way that greatly reduces the time required to complete a recipe. One system embodiment includes an inspection system and a review station that is communicatively linked such that the review station can read from and write to an entire set of data stored at the inspection system. The set of data includes image files of features detected by the inspection system.