The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Dec. 23, 2003
Applicants:
Hiroshi Amemiya, Nirasaki, JP;
Koji Kawaguchi, Nirasaki, JP;
Masaru Suzuki, Nirasaki, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R031/02 ; G01R031/28 ;
U.S. Cl.
CPC ...
Abstract
A probe card transporting apparatus includes a truck and transporting mechanism. The truck can move on a floor surface freely. The transporting mechanism is arranged above the truck to be able to separate from and come into contact with it. The transporting mechanism transports a probe card between the truck and a prober. The transporting mechanism has a base and arm mechanism. The arm mechanism moves forward/backward on the base. An aligning mechanism and fixing mechanism are provided on the base. The aligning mechanism serves for alignment with the prober. The fixing mechanism serves for fixing to the prober.