The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Aug. 22, 2001
Thomas N. Horsky, Boxborough, MA (US);
Alexander S. Perel, Danvers, MA (US);
William K. Loizides, Hollis, NH (US);
Thomas N. Horsky, Boxborough, MA (US);
Alexander S. Perel, Danvers, MA (US);
William K. Loizides, Hollis, NH (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An ion source () for an ion implanter is provided, comprising a remotely located vaporizer () and an ionizer () connected to the vaporizer by a feed tube (). The vaporizer comprises a sublimator () for receiving a solid source material such as decaborane and sublimating (vaporizing) the decaborane. A heating mechanism is provided for heating the sublimator, and the feed tube connecting the sublimator to the ionizer, to maintain a suitable temperature for the vaporized decaborane. The ionizer () comprises a body () having an inlet () for receiving the vaporized decaborane; an ionization chamber () in which the vaporized decaborane may be ionized by an energy-emitting element () to create a plasma; and an exit aperture () for extracting an ion beam comprised of the plasma. A cooling mechanism () is provided for lowering the temperature of walls () of the ionization chamber () (e.g., to below 350° C.) during ionization of the vaporized decaborane to prevent dissociation of vaporized decaborane molecules into atomic boron ions. In addition, the energy-emitting element is operated at a sufficiently low power level to minimize plasma density within the ionization chamber () to prevent additional dissociation of the vaporized decaborane molecules by the plasma itself.