The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Apr. 22, 2003
Rudolf Gujer, Saratoga, CA (US);
Thomas K. Cho, Palo Alto, CA (US);
Lily L. Pang, Fremont, CA (US);
Michael P. Karazim, San Jose, CA (US);
Tetsuya Ishikawa, Saratoga, CA (US);
Rudolf Gujer, Saratoga, CA (US);
Thomas K. Cho, Palo Alto, CA (US);
Lily L. Pang, Fremont, CA (US);
Michael P. Karazim, San Jose, CA (US);
Tetsuya Ishikawa, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A modular lift-pin assembly includes a lift-pin having a distal end, a connector, and an actuator pin. The connector includes an actuator end having a plurality of catch fingers disposed around the actuator end. Each of the plurality of catch fingers includes a lip extending radially inwards. A lift-pin end is coupled to the distal end of the lift-pin, and the actuator pin is coupled to the actuator end of the connector.