The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Jul. 06, 2001
Tadahiro Ohmi, Miyagi, JP;
Shigetoshi Sugawa, Miyagi, JP;
Toshikuni Shinohara, Miyagi, JP;
Tatsuo Ito, Gunma, JP;
Koichi Kanaya, Gunma, JP;
Tadahiro Ohmi, Miyagi, JP;
Shigetoshi Sugawa, Miyagi, JP;
Toshikuni Shinohara, Miyagi, JP;
Tatsuo Ito, Gunma, JP;
Koichi Kanaya, Gunma, JP;
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Abstract
The present invention provides a method for slicing a single crystal, wherein the single crystal is sliced by irradiating a portion to be sliced with an ultra short pulse laser beam while supplying a gas containing gaseous molecules or radicals that react with atoms constituting the single crystal to become stable gaseous molecules in the vicinity of the portion under slicing. Thus, there is provided a method for slicing a single crystal by using a laser processing, in which a single crystal is processed while obtaining a good sliced surface and markedly reducing a slicing loss.