The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2005
Filed:
Jul. 25, 2003
Masaki Kuzumoto, Tokyo, JP;
Seiji Noda, Tokyo, JP;
Izumi Oya, Tokyo, JP;
Makoto Miyamoto, Tokyo, JP;
Hideo Horibe, Tokyo, JP;
Tatsuo Kataoka, Shizuoka, JP;
Tetsuji Oishi, Shizuoka, JP;
Masaki Kuzumoto, Tokyo, JP;
Seiji Noda, Tokyo, JP;
Izumi Oya, Tokyo, JP;
Makoto Miyamoto, Tokyo, JP;
Hideo Horibe, Tokyo, JP;
Tatsuo Kataoka, Shizuoka, JP;
Tetsuji Oishi, Shizuoka, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.