The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2005
Filed:
Sep. 26, 2003
Yuichi Iwasaki, Tochigi, JP;
Masato Muraki, Tokyo, JP;
Kenji Tamamori, Kanagawa, JP;
Kouji Asano, Tokyo, JP;
Masayoshi Esashi, Miyagi, JP;
Yoshinori Nakayama, Tokyo, JP;
Shinichi Hashimoto, Tokyo, JP;
Yoshiaki Moro, Tokyo, JP;
Yuichi Iwasaki, Tochigi, JP;
Masato Muraki, Tokyo, JP;
Kenji Tamamori, Kanagawa, JP;
Kouji Asano, Tokyo, JP;
Masayoshi Esashi, Miyagi, JP;
Yoshinori Nakayama, Tokyo, JP;
Shinichi Hashimoto, Tokyo, JP;
Yoshiaki Moro, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A deflector which deflects a charged particle beam includes a substrate having an opening through which the charged particle beam should pass, and a deflection electrode which is arranged in the opening to deflect the charged particle beam and has a first conductive member and second conductive member, which are formed by plating. The second conductive member is formed on the surface of the first conductive member and is made of a material that is more difficult to oxidize than the first conductive member. The first conductive member is made of a material having smaller residual stress than the second conductive member.