The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2005
Filed:
Jun. 16, 2003
Shuji Yamaoka, Hiroshima, JP;
Shogo Ishioka, Hiroshima, JP;
Shuji Yamaoka, Hiroshima, JP;
Shogo Ishioka, Hiroshima, JP;
OHT Inc., Hiroshima, JP;
Abstract
An inspection apparatus and method are disclosed. The inspection apparatus comprises a probehaving a width equal to or less than that of the layout pitch of conductive patternsto be inspected, and a sensor sectionhaving an area capable of covering the layout region of the conductive patterns. The probeis adapted to be scanningly moved across an inspection-signal supply region including respective portions of the conductive patterns. The sensor sectionis positioned opposed to the conductive patternsAn AC inspection signal is fed from an AC power sourceto the probeto form a capacitive coupling between one electrode or the conductive pattern, and the other electrode or the sensor sectionand a detected signal from the sensor sectionis amplified through an amplifierto check the detected signal. Then, it is determined if each of the conductive patterns supplied with the inspection signal includes a short-circuit, according to whether the level of the detected signal is different from a signal level in a normal state. The present invention can provide an inspection apparatus and method capable of readily detecting a short-circuit possibly existing in various conductive patterns, in a simple control.