The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Aug. 18, 2004
Bing-ru Chen, Hsinchu, TW;
Wu-cheng Kuo, Hsinchu, TW;
Ming-hung Chen, Hsinchu, TW;
Jui-ping Weng, Hsinchu, TW;
Yeh-i Su, Hsinchu, TW;
Hsiao-wen Lee, Hsinchu, TW;
Bing-Ru Chen, Hsinchu, TW;
Wu-Cheng Kuo, Hsinchu, TW;
Ming-Hung Chen, Hsinchu, TW;
Jui-Ping Weng, Hsinchu, TW;
Yeh-I Su, Hsinchu, TW;
Hsiao-Wen Lee, Hsinchu, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
An electrostatic movable micro mirror chip includes an upper mirror plate and a lower electrode plate positioned and jointed together via pairs of fitting solder and positioning grooves. It improves the optical quality of the mirror chip by a lower joining temperature. The fitting and jointing achieves easy positioning and interconnection. The fabrication time and cost is less. The mirror in the mirror chip is plated with metallic coating on both sides so as to balance the stress and improve its flatness.