The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Sep. 11, 2001
Applicants:
Takashi Akahori, Tsukui-gun, JP;
Gishi Chung, Nirasaki, JP;
Kohei Kawamura, Nirasaki, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L023/48 ; H01L021/4763 ;
U.S. Cl.
CPC ...
Abstract
With a stopper layeras an etching stopper, a second grooveand a contact holeare formed. Copper is buried inside the second grooveand the contact hole, thereby forming a plug layerand an overlying wiring layerconnected to an underlying wiring layervia the plug layer. The stopper layeris comprised of Si, C and N as essential components. First and second cap layersandare also comprised of Si, C and N as essential components.