The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Jul. 10, 2003
Haruhito Ono, Kanagawa, JP;
Kenichi Nagae, Kanagawa, JP;
Masaki Takakuwa, Tokyo, JP;
Yoshinori Nakayama, Tokyo, JP;
Harunobu Muto, Tokyo, JP;
Haruhito Ono, Kanagawa, JP;
Kenichi Nagae, Kanagawa, JP;
Masaki Takakuwa, Tokyo, JP;
Yoshinori Nakayama, Tokyo, JP;
Harunobu Muto, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
There is provided a multi-charged beam lens constituted by stacking, via fiber chips serving as insulator members along the optical path of a charged beam, a plurality of electrodes having a charged beam passing region where a plurality of charged beam apertures are formed. The electrodes have shield apertures between the charged beam passing region and the fiber chips. A conductive shield extends through the shield apertures without contacting the electrodes, and cuts off a straight path which connects the charged beam passing region and the fiber chips serving as insulator members. This prevents the influence of charge-up of the insulator members on an electron beam in the multi-charged beam lens.