The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Aug. 01, 2003
Applicants:
Oliver Kienzle, Aalen, DE;
Rainer Knippelmeyer, Aalen, DE;
Heiko Müller, Heidelberg, DE;
Inventors:
Assignee:
Carl Zeiss NTS GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J037/256 ;
U.S. Cl.
CPC ...
Abstract
A particle-optical apparatus is disclosed which combines the functions of an energy selectorand a beam splitterThe particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beamand a secondary electron beam