The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2005
Filed:
Apr. 16, 2004
Shuichi Nakagawa, Hitachinaka, JP;
Eiichi Seya, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Eiichi Seya, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base, an X tablethat can be moved in an X direction on the baseby an X feed screw, and a Y tablethat is supported on the X tableand movable in a Y direction. A third tableis disposed on the base, the third table being movable in the Y direction by a Y-feed screwpositioned on the base. Additionally, a slide unitis disposed on the third table, the slide unitbeing movable in the X direction and connected with the Y table