The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2005
Filed:
Jan. 28, 2003
Alexander Libinson, Holon, IL;
Haim Feldman, Nof Ayalon, IL;
Daniel Some, Ashdod, IL;
Boris Goldberg, Ashdod, IL;
Alexander Libinson, Holon, IL;
Haim Feldman, Nof Ayalon, IL;
Daniel Some, Ashdod, IL;
Boris Goldberg, Ashdod, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.