Circuit pattern inspection device, circuit pattern inspection method, and recording medium

Abstract

Disclosed is an circuit-pattern inspection apparatus comprising a power supply elementadapted to be capacitively coupled with a parallel array of conductive patternsto supply an inspection signal to one end of each of the conductible patterns, an open sensoradapted to be capacitively coupled with all of the other ends of the conductive patterns to detect the inspection signal, and a short sensorarranged at a position displaced from the power supply elementand adapted to be capacitively coupled with two lines of the conductive patterns to detect the inspection signal. The quality of the conductive pattern is inspected such that the presence of disconnection is determined when the detect signal from the open sensoris largely reduced, and the presence of short is determined when the detect signal from the short sensorlargely rises and then falls. The circuit-pattern inspection apparatus can detect defects in a circuit board reliably and readily.