The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2005
Filed:
Jul. 23, 2003
Hidemitsu Naya, Tokyo, JP;
Koji Hashimoto, Tokyo, JP;
Masamichi Kawano, Ibaraki, JP;
Rikio Tomiyoshi, Ibaraki, JP;
Hidemitsu Naya, Tokyo, JP;
Koji Hashimoto, Tokyo, JP;
Masamichi Kawano, Ibaraki, JP;
Rikio Tomiyoshi, Ibaraki, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.