The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2005
Filed:
Jun. 09, 2004
Applicants:
Kenichi Ohto, Tokyo, JP;
Takashi Terauchi, Tokyo, JP;
Inventors:
Kenichi Ohto, Tokyo, JP;
Takashi Terauchi, Tokyo, JP;
Assignee:
Renesas Technology Corp., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/76 ;
U.S. Cl.
CPC ...
Abstract
An alignment mark section on a semiconductor substrate has two grooves which are filled with silicon oxide. The surface of the portion of the semiconductor substrate sandwiched by these grooves is lower than other portions of the semiconductor substrate to produce a step having a predetermined depth in the alignment mark section.