The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Feb. 21, 2001
Christopher A. Bode, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Anthony J. Toprac, Austin, TX (US);
Joyce S. Oey Hewett, Austin, TX (US);
Anastasia Oshelski Peterson, Austin, TX (US);
Michael L. Miller, Cedar Park, TX (US);
Christopher A. Bode, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Anthony J. Toprac, Austin, TX (US);
Joyce S. Oey Hewett, Austin, TX (US);
Anastasia Oshelski Peterson, Austin, TX (US);
Michael L. Miller, Cedar Park, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method for controlling a tool adapted to process workpieces in accordance with an operating recipe based on a process target value is provided. The method includes collecting manufacturing characteristic data associated with the workpieces; correlating the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces; and adjusting the process target value based on the first manufacturing metric distribution. A manufacturing system includes a processing tool and a target monitor. The processing tool is adapted to process workpieces in accordance with an operating recipe based on a process target value. The target monitor is adapted to collect manufacturing characteristic data associated with the workpieces, correlate the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, and adjust the process target value based on the first manufacturing metric distribution.