The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
May. 01, 2003
Applicants:
Farhad Moghadam, Saratoga, CA (US);
Jun Zhao, Cupertino, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Rick J. Roberts, Sunnyvale, CA (US);
Li-qun Xia, Santa Clara, CA (US);
Alexandros T. Demos, Fremont, CA (US);
Inventors:
Farhad Moghadam, Saratoga, CA (US);
Jun Zhao, Cupertino, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Rick J. Roberts, Sunnyvale, CA (US);
Li-Qun Xia, Santa Clara, CA (US);
Alexandros T. Demos, Fremont, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/31 ; H01L021/469 ;
U.S. Cl.
CPC ...
Abstract
One embodiment of the present invention is a method for fabricating a low-k dielectric film that includes steps of: (a) chemical vapor depositing a lower-k dielectric film; and (b) e-beam treating the lower-k dielectric film.