The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Apr. 12, 2002
Richard A. Hogle, Oceanside, CA (US);
Patrick Joseph Helly, Valley Center, CA (US);
Ce MA, Apex, NC (US);
Laura Joy Miller, San Diego, CA (US);
Richard A. Hogle, Oceanside, CA (US);
Patrick Joseph Helly, Valley Center, CA (US);
Ce Ma, Apex, NC (US);
Laura Joy Miller, San Diego, CA (US);
The BOC Group, Inc., Murray Hill, NJ (US);
Abstract
The use of a polyhedral oligomeric silsesquioxane compound and linking agent to form an ultra low-k dielectric film on semiconductor or integrated circuit surfaces is disclosed. The reaction between the polyhedral oligomeric silsesquioxane compound and linking agent is done in a chemical vapor deposition chamber.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile