The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Dec. 16, 2003
Applicants:
Jean-hua Yuen, Chang hua, TW;
Po-ming Chen, Hsinchu, TW;
Ming-ji Chiang, Hsinchu, TW;
Ji-shen Yang, Hsinchu, TW;
Inventors:
Jean-Hua Yuen, Chang hua, TW;
Po-Ming Chen, Hsinchu, TW;
Ming-Ji Chiang, Hsinchu, TW;
Ji-Shen Yang, Hsinchu, TW;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F015/00 ;
U.S. Cl.
CPC ...
Abstract
A method for detecting wafer flat shift, and an apparatus () having two sensors () and () in a power supply circuit () for wafer fabrication equipment, the sensors () and () detecting a shift in wafer flat position from a desired position and shutting off the wafer fabrication equipment.