The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Mar. 02, 2001
Applicant:
Miyuki Matsuya, Tokyo, JP;
Inventor:
Miyuki Matsuya, Tokyo, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J037/065 ;
U.S. Cl.
CPC ...
Abstract
A charged particle beam instrument capable of reducing the spread of the probe diameter while maintaining the probe current constant. An electrical current Iis detected by a detection aperture to create a feedback signal. The feedback signal is supplied to a condenser lens control and to an objective lens control via a signal adjuster. The objective lens control portion controls the objective lens such that the charged particle probe is in focus.