The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Sep. 30, 2003
Givi Georgievitch Zukavishvili, Troitsk, RU;
Vladimir Vital'evitch Ivanov, Moscow, RU;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Evgenil Dmitreevitch Korob, Troitsk, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Pavel Stanislavovich Antsiferov, Troitsk, RU;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Vladimir Vital'Evitch Ivanov, Moscow, RU;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Evgenil Dmitreevitch Korob, Troitsk, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Pavel Stanislavovich Antsiferov, Troitsk, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source unit is provided that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a space between said anode and cathode and to form a plasma so as to generate electromagnetic radiation. The substance may comprise xenon, indium, lithium, tin or any suitable material. To improve conversion efficiency, the source unit may be constructed to have a low inductance, and operated with a minimum of plasma. To, for example, improve heat dissipation, a fluid circulation system can be created within the source volume and a wick by using a fluid in both its vapor and liquid states. To, for example, prevent contamination from entering a lithographic projection apparatus, the source unit can be constructed to minimize the production of contamination, and a trap can be employed to capture the contamination without interfering with the emitted radiation.