The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Sep. 12, 2000
Hiroki Oka, Yamanashi, JP;
Hiroki Oka, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A vacuum processing device includes a driven bodyprovided inside a vacuum processing chamber, a driving meansprovided outside the vacuum processing chamberand a drive shaftconnecting the driven bodyto the driving means. A first annular bodyis secured to the drive shaftand a second annular bodyis rotatably supported by the first annular body. A bellowsthat airtightly seals the periphery of the drive shaftis provided so as to connect the second annular bodywith the inner wall of the vacuum processing chamber. In this structure, the bellowsis allowed to move as one body with the drive shaftduring vertical motion of the drive shaftbut is made to stay in place during rotational motion of the drive shaft. Thus, the drive shaft, which engages in vertical motion and rotational motion, is airtightly sealed by the bellows.