The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Jul. 30, 2002
Betsalel Tzvi Rechav, Kiryat-Tivon, IL;
Jimmy Vishnipolsky, Petah Tikva, IL;
Efim Vinnitsky, Ashkelon, IL;
Betsalel Tzvi Rechav, Kiryat-Tivon, IL;
Jimmy Vishnipolsky, Petah Tikva, IL;
Efim Vinnitsky, Ashkelon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A work-piece deflection management system including: (a) a first and a second vacuum chambers, each said vacuum chamber having an air-bearing seal circumscribing one of its sides, and (b) a work-piece plate; wherein the air-bearing seals are aligned to face one-another with the work-piece plate respectively there-between, allowing the work-piece to be laterally slid with respect to the air-bearing seals while maintaining a first predefined vacuum level within the first vacuum chamber and maintaining a second predefined vacuum level within the second vacuum chamber.