The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Nov. 20, 2003
Jan Van Elp, Delft, NL;
Martinus Hendrikus Antonius Leenders, Rotterdam, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Hugo Matthieu Visser, Utrecht, NL;
Levinus Pieter Bakker, Eindhoven, NL;
Jan Van Elp, Delft, NL;
Martinus Hendrikus Antonius Leenders, Rotterdam, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Hugo Matthieu Visser, Utrecht, NL;
Levinus Pieter Bakker, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a lithographic projection apparatus, a grating spectral filter is used to filter an EUV projection beam. The grating spectral filter is preferably a blazed, grazing incidence, reflective grating. Cooling channels may be provided in or on the rear of the grating spectral filter. The grating spectral filter may be formed of a material effectively invisible to the desired radiation.